来源:《Plasma Science and Technology》2018年第01期  作者:宋法伦;李飞;朱明冬;王浪平;张北镇;龚海涛;甘延青;金晓;
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Development and experimental study of large size composite plasma immersion ion implantation device

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Plasma immersion ion implantation(PⅢ) overcomes the direct exposure limit of traditional beamline ion implantation, and is suitable for the treatment of complex work-piece with large size. PⅢ technology is often used for surface modification of metal, plastics and ceramics. Based on the requirement of surface modification of large size insulating material, a composite full-directional PⅢ device based on RF plasma source and metal plasma source is developed in this paper. This device can not only(本文共计5页)......[继续阅读本文]

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